./neb0_image05_EIGENVAL output for 40: 572-->565: F2 + F3Si-NF-SiF3, to SiF4 + F3Si-NF2 (TSS)
Status:
finished
12 12 1 1
0.8333333E+02 0.1000000E-08 0.1000000E-08 0.1000000E-08 0.5000000E-15
1.000000000000000E-004
CAR
No title
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